Evolution of Surface Roughness During CVD Growth
نویسندگان
چکیده
منابع مشابه
Roughness evolution during growth of hydrogenated tetrahedral amorphous carbon
Hydrogenated tetrahedral amorphous carbon (ta-C:H) is advantageous as coating material for high-density magnetic and optical storage devices, due to its favorable combination of density and smoothness. An advantage of ta-C:H over tetrahedral amorphous carbon (ta-C) is the absence of macroparticles, often found in cathodic arc deposition of ta-C, and the hydrogen rich surface, compatible with th...
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ژورنال
عنوان ژورنال: MRS Proceedings
سال: 1996
ISSN: 0272-9172,1946-4274
DOI: 10.1557/proc-440-157